High throughput system detects critical AMCs in-line at parts per trillion levels
SANTA CLARA, California, March 25, 2020 /PRNewswire/ — Picarro announces the launch of our fully optimized AMC monitoring system – the Picarro SAM (Sample. Analyze. Monitor.) The system is comprised of Picarro’s industry leading CRDS-based sensor integrated into a state-of-the-art sampling system. The SAM unit provides high throughput sampling without compromising the performance of the sensor.
The new Picarro SAM system is a substantial move from the component product to the System Solution. The benefits of a one-source designed, manufactured and tested system include:
- Designed and fully integrated system for Picarro hardware and software – no integration compatibility concerns
- The Picarro SAM system is carefully optimized – system performance is guaranteed to the Picarro Semi system specification
The significant performance benefits of SAM are made possible by an innovative, patent-pending gas delivery manifold that enables parts per trillion (ppt) sensitivity at very short times to detection as well as extremely quick SAM System recovery to baseline sensitivity levels. This makes SAM an ideal choice for an in-line, real-time AMC monitoring system. The system comes with an easy to use GUI that allows for a variety of charting and trending analyses.
SAM can be configured to sample from 8 or 16 ports and is currently available to detect ammonia, hydrogen fluoride, and hydrochloric acid, the three key AMC’s impacting semiconductor wafer yield. Going forward, SAM systems will be offered for other gases in accordance with Picarro’s semiconductor product roadmap.
The SAM system roadmap will also support sophisticated AMC analytics to help customers quickly identify the location of AMC events more precisely and thereby allow faster corrective actions to improve AMC related wafer yield.
Picarro provides industry leading solutions for real-time AMC monitoring. Their cavity ring-down spectroscopy (CRDS) technology offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS) and ion chromatography. Picarro’s SI2000 Series analyzers enable fast response to contaminants in the cleanroom in seconds, not hours. With real-time continuous parts per trillion (ppt) level analysis, Picarro analyzers provide early warning of contamination events for AMC monitoring in cleanrooms, FOUP, and fab equipment. For additional information on Picarro Inc., please visit semi.picarro.com or find us on Twitter.
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